DeBusk, Damon, ed. <br/><br/>
Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III  [eBook] 

 - Washington, USA  SPIE  1996 
 - Online resource 
 - Proceedings of SPIE; V. 2877 .
<br/><br/><label>ISBN: </label>9780819422750 (Print)