@book{29414,
	author = {DeBusk, Damon, ed.},
	title = {Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2877},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2877}
}