@book{29263,
	author = {Sanchez, Martha, ed.},
	title = {Novel Patterning Technologies for Semiconductors, MEMS/NEMS, and MOEMS 2019},
	publisher = {SPIE},
	year = {2019},
	series = {Proceedings of SPIE; V. 10958},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10958}
}