@book{28876,
	author = {Peckerar, Martin, ed.},
	title = {Nanostructure Science, Metrology, and Technology},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4608},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4608}
}