00594nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245014400116260003200260300002000292490003300312856010300345IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819460271 (Print)  cIIA Library  aFreund, Minoru, ed. 0aNanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystemsh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 6003  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6003yClick Here to Access eBook