Freund, Minoru, ed. <br/><br/>
Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems  [eBook] 

 - Washington, USA  SPIE  2005 
 - Online resource 
 - Proceedings of SPIE; V. 6003 .
<br/><br/><label>ISBN: </label>9780819460271 (Print)