@book{28875,
	author = {Freund, Minoru, ed.},
	title = {Nanostructure Integration Techniques for Manufacturable Devices, Circuits, and Systems: Interfaces, Interconnects, and Nanosystems},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 6003},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6003}
}