TY  - BOOK
AU  - Lai, Warren, ed.
TI  - Nanofabrication: Technologies, Devices, and Applications II
T2  - Proceedings of SPIE; V. 6002
SN  - 9780819460264 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6002
ER  -