00520nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245007300113260003200186300002000218490003300238856010300271IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819460264 (Print)  cIIA Library  aLai, Warren, ed. 0aNanofabrication: Technologies, Devices, and Applications IIh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 6002  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6002yClick Here to Access eBook