@book{28779,
	author = {Lai, Warren, ed.},
	title = {Nanofabrication: Technologies, Devices, and Applications},
	publisher = {SPIE},
	year = {2005},
	series = {Proceedings of SPIE; V. 5592},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5592}
}