TY  - BOOK
AU  - Dobisz, Elizabeth, ed.
TI  - Nanofabrication Technologies
T2  - Proceedings of SPIE; V. 5220
SN  - 9780819450937 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5220
ER  -