00532nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245007900119260003200198300002000230490003300250856010300283IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819464064 (Print)  cIIA Library  aDobisz, Elizabeth, ed. 0aNanoengineering: Fabrication, Properties, Optics, and Devices IIIh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6327  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6327yClick Here to Access eBook