TY  - BOOK
AU  - Sood, Dinesh, ed.
TI  - Nano- and Microtechnology: Materials, Processes, Packaging, and Systems
T2  - Proceedings of SPIE; V. 4936
SN  - 9780819447319 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4936
ER  -