00533nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245008500114260003200199300002000231490003300251856010300284IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447319 (Print)  cIIA Library  aSood, Dinesh, ed. 0aNano- and Microtechnology: Materials, Processes, Packaging, and Systemsh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4936  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4936yClick Here to Access eBook