Sood, Dinesh, ed. <br/><br/>
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems  [eBook] 

 - Washington, USA  SPIE  2002 
 - Online resource 
 - Proceedings of SPIE; V. 4936 .
<br/><br/><label>ISBN: </label>9780819447319 (Print)