@book{28732,
	author = {Sood, Dinesh, ed.},
	title = {Nano- and Microtechnology: Materials, Processes, Packaging, and Systems},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4936},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4936}
}