TY  - BOOK
AU  - Ottevaere, Heidi, ed.
TI  - Nano- and Micro-Metrology
T2  - Proceedings of SPIE; V. 5858
SN  - 9780819458582 (Print)
PY  - 2005///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5858
ER  -