TY  - BOOK
AU  - Graef, Martin, ed.
TI  - Multilevel Interconnect Technology II
T2  - Proceedings of SPIE; V. 3508
SN  - 9780819429674 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3508
ER  -