TY  - BOOK
AU  - Patel, Divyesh, ed.
TI  - Multilevel Interconnect Technology
T2  - Proceedings of SPIE; V. 3214
SN  - 9780819425461 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3214
ER  -