00498nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245004800116260003200164300002000196490003300216856010300249IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819425461 (Print)  cIIA Library  aPatel, Divyesh, ed. 0aMultilevel Interconnect Technologyh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3214  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3214yClick Here to Access eBook