TY  - BOOK
AU  - Freund, Robert, ed.
TI  - Multichamber and In-Situ Processing of Electronic Materials
T2  - Proceedings of SPIE; V. 1188
SN  - 9780819402240 (Print)
PY  - 1990///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1188
ER  -