@book{28601,
	author = {Freund, Robert, ed.},
	title = {Multichamber and In-Situ Processing of Electronic Materials},
	publisher = {SPIE},
	year = {1990},
	series = {Proceedings of SPIE; V. 1188},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1188}
}