00536nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245008400118260003200202300002000234490003300254856010300287IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819400727 (Print)  cIIA Library  aGriffiths, James, ed. 0aMonitoring and Control of Plasma-Enhanced Processing of Semiconductorsh[eBook]  aWashington, USAbSPIEc1989  aOnline resource  aProceedings of SPIE; V. 1037  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/1037yClick Here to Access eBook