TY  - BOOK
AU  - Urey, Hakan, ed.
TI  - MOEMS Display, Imaging, and Miniaturized Microsystems IV
T2  - Proceedings of SPIE; V. 6114
SN  - 9780819461568 (Print)
PY  - 2006///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6114
ER  -