00517nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245007000113260003200183300002000215490003300235856010300268IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819461568 (Print)  cIIA Library  aUrey, Hakan, ed. 0aMOEMS Display, Imaging, and Miniaturized Microsystems IVh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6114  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6114yClick Here to Access eBook