@book{28578,
	author = {Urey, Hakan, ed.},
	title = {MOEMS Display, Imaging, and Miniaturized Microsystems IV},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6114},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6114}
}