00497nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002100092245005000113260003200163300002000195490003300215856010300248IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819452566 (Print)  cIIA Library  aUrey, Hakan, ed. 0aMOEMS Display and Imaging Systems IIh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5348  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5348yClick Here to Access eBook