00783nam a2200193Ia 4500003000900000008004100009020002600050020002700076040001600103100004100119245005000160260003200210300002000242490003400262856010400296942000700400999001700407952016500424IN-BaIIA211028s9999    xx      s     000 0 eng d  a9781510625044 (Print)  a9781510625051 (Online)  cIIA Library  aPiyawattanametha, Wibool, ed.945684 0aMOEMS and Miniaturized Systems XVIIIh[eBook]  aWashington, USAbSPIEc2019  aOnline resource  aProceedings of SPIE; V. 10931  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10931yClick Here to Access eBook  cEB  c28574d28574  00104070aBANbBANd2011-07-01eSPIEhV. 10931l0pEB8034r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/10931w2021-11-05yEB