TY  - BOOK
AU  - Piyawattanametha, Wibool, ed.
TI  - MOEMS and Miniaturized Systems XVIII
T2  - Proceedings of SPIE; V. 10931
SN  - 9781510625044 (Print)
PY  - 2019///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/10931
ER  -