Piyawattanametha, Wibool, ed. <br/><br/>
MOEMS and Miniaturized Systems XVIII  [eBook] 

 - Washington, USA  SPIE  2019 
 - Online resource 
 - Proceedings of SPIE; V. 10931 .
<br/><br/><label>ISBN: </label>9781510625044 (Print) 9781510625051 (Online)