Piyawattanametha, Wibool, ed. <br/><br/>
MOEMS and Miniaturized Systems XVII  [eBook] 

 - Washington, USA  SPIE  2018 
 - Online resource 
 - Proceedings of SPIE; V. 10545 .
<br/><br/><label>ISBN: </label>9781510615755 (Print) 9781510615762 (Online)