00509nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003400092245004900126260003200175300002000207490003300227856010300260IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819498908 (Print)  cIIA Library  aPiyawattanametha, Wibool, ed. 0aMOEMS and Miniaturized Systems XIIIh[eBook]  aWashington, USAbSPIEc2014  aOnline resource  aProceedings of SPIE; V. 8977  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8977yClick Here to Access eBook