TY  - BOOK
AU  - Dickensheets, David, ed.
TI  - MOEMS and Miniaturized Systems VI
T2  - Proceedings of SPIE; V. 6466
SN  - 9780819465795 (Print)
PY  - 2007///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6466
ER  -