00729nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003400092245004600126260003200172300002000204490003300224856010300257942000700360999001700367952016300384IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819456939 (Print)  cIIA Library  aEl-Fatatry, Ayman, ed.945671 0aMOEMS and Miniaturized Systems Vh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5719  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5719yClick Here to Access eBook  cEB  c28561d28561  00104070aBANbBANd2011-07-01eSPIEhV. 5719l0pEB8021r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5719w2021-11-05yEB