00499nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245004600119260003200165300002000197490003300217856010300250IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819456939 (Print)  cIIA Library  aEl-Fatatry, Ayman, ed. 0aMOEMS and Miniaturized Systems Vh[eBook]  aWashington, USAbSPIEc2005  aOnline resource  aProceedings of SPIE; V. 5719  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5719yClick Here to Access eBook