TY  - BOOK
AU  - Schenk, Harald, ed.
TI  - MOEMS and Miniaturized Systems IX
T2  - Proceedings of SPIE; V. 7594
SN  - 9780819479907 (Print)
PY  - 2010///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7594
ER  -