TY  - BOOK
AU  - El-Fatatry, Ayman, ed.
TI  - MOEMS and Miniaturized Systems IV
T2  - Proceedings of SPIE; V. 5346
SN  - 9780819452542 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5346
ER  -