TY  - BOOK
AU  - Smith, James, ed.
TI  - MOEMS and Miniaturized Systems III
T2  - Proceedings of SPIE; V. 4983
SN  - 9780819447838 (Print)
PY  - 2003///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4983
ER  -