00496nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002200092245004800114260003200162300002000194490003300214856010300247IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819447838 (Print)  cIIA Library  aSmith, James, ed. 0aMOEMS and Miniaturized Systems IIIh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 4983  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4983yClick Here to Access eBook