@book{28558,
	author = {Smith, James, ed.},
	title = {MOEMS and Miniaturized Systems III},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 4983},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4983}
}