00725nam a2200181Ia 4500003000900000008004100009020002600050040001600076100002900092245004700121260003200168300002000200490003300220856010300253942000700356999001700363952016300380IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819442895 (Print)  cIIA Library  aMotamedi, M. Edward, ed. 0aMOEMS and Miniaturized Systems IIh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4561  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4561yClick Here to Access eBook  cEB  c28557d28557  00104070aBANbBANd2011-07-01eSPIEhV. 4561l0pEB8017r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4561w2021-11-05yEB