00502nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245004700121260003200168300002000200490003300220856010300253IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819442895 (Print)  cIIA Library  aMotamedi, M. Edward, ed. 0aMOEMS and Miniaturized Systems IIh[eBook]  aWashington, USAbSPIEc2001  aOnline resource  aProceedings of SPIE; V. 4561  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4561yClick Here to Access eBook