@book{28556,
	author = {Motamedi, M. Edward, ed.},
	title = {MOEMS and Miniaturized Systems},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 4178},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4178}
}