TY  - BOOK
AU  - Glembocki, Orest, ed.
TI  - Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices
T2  - Proceedings of SPIE; V. 0794
SN  - 9780892528295 (Print)
PY  - 1987///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0794
ER  -