@book{28542,
	author = {Glembocki, Orest, ed.},
	title = {Modern Optical Characterization Techniques for Semiconductors and Semiconductor Devices},
	publisher = {SPIE},
	year = {1987},
	series = {Proceedings of SPIE; V. 0794},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0794}
}