TY  - BOOK
AU  - Motamedi, M. Edward, ed.
TI  - Miniaturized Systems with Micro-Optics and Micromechanics III
T2  - Proceedings of SPIE; V. 3276
SN  - 9780819427151 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3276
ER  -