00530nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245007500121260003200196300002000228490003300248856010300281IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819427151 (Print)  cIIA Library  aMotamedi, M. Edward, ed. 0aMiniaturized Systems with Micro-Optics and Micromechanics IIIh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3276  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3276yClick Here to Access eBook