@book{28414,
	author = {Motamedi, M. Edward, ed.},
	title = {Miniaturized Systems with Micro-Optics and Micromechanics III},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3276},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3276}
}