00529nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002900092245007400121260003200195300002000227490003300247856010300280IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819424198 (Print)  cIIA Library  aMotamedi, M. Edward, ed. 0aMiniaturized Systems with Micro-Optics and Micromechanics IIh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3008  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3008yClick Here to Access eBook