TY  - BOOK
AU  - Motamedi, M. Edward, ed.
TI  - Miniaturized Systems with Micro-Optics and Micromechanics
T2  - Proceedings of SPIE; V. 2687
SN  - 9780819420619 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2687
ER  -